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Seed Laser Pro single-frequency fiber laser module (illustrative image)
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193 nm Single-Frequency Frequency-Converted Laser

193 nm is one of the most demanding wavelengths in photonics. Generating coherent output here requires multi-stage frequency conversion, DUV-grade optics, and a fiber seed stable enough to preserve narrow linewidth through every conversion step.

Seed Laser Pro’s 193 nm Single-Frequency Laser delivers 1 to 3 mW of CW output at 193.3 nm. Linewidth stays below 80 kHz. Side-mode suppression ratio reaches 20 to 24 dB. The free-space output beam is clean, with M² below 1.4 and 1.0 mm diameter at the output port.

Built for semiconductor lithography research, precision microfabrication, DUV spectroscopy, and medical applications. Custom wavelength configurations are available on request.

PRODUCT FEATURES 

  • Deep UV Single-Frequency Output at 193.3 nm : Continuous-wave single longitudinal mode output in the deep ultraviolet. Coherent, stable, and fully solid-state. No gas mixtures. No high-voltage discharge. No fluorine handling.
  • Sub-80 kHz Linewidth from Fiber Seed Architecture : Spectral purity inherited directly from the narrow-linewidth fiber seed. To optimize seeding for an ArF amplifier, linewidth must be controlled below 4 GHz. At sub-80 kHz, this laser sits three orders of magnitude inside that threshold.
  • Active Power Stabilization : Output power stability within 1% RMS over two hours. Thermal and conversion efficiency drift in the DUV stage are actively compensated throughout continuous operation.

TYPICAL APPLICATIONS 

  • Semiconductor Lithography Research and Metrology : 193 nm is the wavelength of ArF excimer lithography, used across the industry for DUV patterning. This CW single-frequency source is not a production lithography laser. It serves as a coherent reference for optics metrology, interferometric wavefront testing, and defect inspection setups where excimer coherence is too limited.
  • Precision Microfabrication : 193 nm photons carry 6.4 eV each. That energy level enables direct ablation of polymers, carbon compounds, and biological tissue. Thermal damage to surrounding material is minimal because energy coupling happens at the photochemical level rather than through heat.
  • Medical Applications : 193 nm is the clinical wavelength for corneal reshaping in refractive surgery. Coherent CW output with stable power and narrow linewidth supports both surgical laser systems and the calibration and research setups around them.
  • Deep UV Spectroscopy : Sub-80 kHz linewidth at 193 nm resolves fine spectral features in UV absorption spectra of molecules, ions, and semiconductor materials that broadband or incoherent DUV sources cannot distinguish.

Custom wavelength or output power required? The central wavelength is customizable. Custom power configurations and OEM integration support are available. Contact Seed Laser Pro’s engineering team at the design stage.

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193 nm Single-Frequency Frequency-Doubled Laser
Technical Parameter Unit Technical Specifications
Min Typical Max
Central Wavelength nm – 193.3 (Customizable) –
Optical Mode / Single Longitudinal Mode, Continuous Wave
Output Power mW 1 2 3
Linewidth kHz – < 80
Output Power Stability (RMS) @ 2h % – < 1
Output Power Adjustment % – 50–100
Wavelength Tuning Range pm – / –
Side Mode Suppression Ratio dB 20 22 24
Beam Quality / – M² < 1.4
Operating Voltage VAC – 90–250V (50–60Hz)
Operating Temperature °C 20 25 30
Output Type / – Free-Space Optical Output
Output Beam Diameter mm 0.8 1 1.2
Beam Waist Position (Relative to Output Port) m – < 1 –
Dimensions mm 330(L) × 600(W) × 130(H)

Why 193 nm Is the Hardest Wavelength to Generate

Generating coherent light at 193 nm requires solving three problems simultaneously that are straightforward at longer wavelengths. First, standard optical glass absorbs strongly below approximately 200 nm. Fused silica transmits at 193 nm, but standard BK7, borosilicate, and most coating materials do not. The entire optical path from generation to output must use DUV-grade fused silica and specialized coatings. Second, most nonlinear crystals used for frequency conversion at visible and near-infrared wavelengths are opaque or unstable at 193 nm. Lithium triborate (LBO) is an ideal nonlinear crystal for frequency mixing at deep UV wavelengths because of its wide transparency range, high damage threshold, and excellent phase-matching properties. Reaching 193 nm requires carefully selected crystals and a multi-stage conversion architecture. Third, the photon energy at 193 nm is high enough to cause color center formation in optical materials under prolonged illumination. This mechanism degrades transmission and conversion efficiency over time. Managing it requires careful material selection and power density control throughout the conversion chain. Seed Laser Pro’s 193 nm laser addresses all three through proprietary deep UV generation technology built around narrow-linewidth fiber seed architecture and multi-stage frequency conversion.

How the Fiber Seed Architecture Produces 193 nm

The 193 nm output starts with a single-frequency fiber seed laser in the near-infrared. This seed produces narrow-linewidth, low-phase-noise output with the stability and coherence that fiber laser technology provides. The seed output then passes through a sequence of nonlinear frequency conversion stages. One part undergoes fourth-harmonic generation to create a 258 nm laser, while another part pumps an optical parametric stage generating a 1553 nm signal. These beams are then combined in cascaded LBO crystals to produce the desired 193 nm laser output.  The key result of this architecture is coherence inheritance. The sub-80 kHz linewidth at 193 nm comes directly from the narrow-linewidth fiber seed. Each conversion stage preserves the spectral quality of the input. The final 193 nm output is a single-frequency, narrow-linewidth source with the stability of a fiber laser and the wavelength of deep UV. This is what separates this product from ArF excimer lasers. An excimer generates 193 nm through electrical discharge in a gas mixture. The output is incoherent, has a broad linewidth, and requires regular gas replacement and maintenance. The solid-state approach produces coherent, narrow-linewidth CW output in a sealed system with no consumable gas and no high-voltage discharge circuitry.

Linewidth and Coherence at 193 nm

Sub-80 kHz linewidth at 193 nm corresponds to a coherence length of approximately 460 m. For lithography optics metrology and interferometric wavefront testing, this coherence length is sufficient for path differences far exceeding any realistic test setup. For comparison, the narrowest linewidth reported for a 193 nm laser from LBO crystal systems is approximately 640 MHz. At sub-80 kHz, Seed Laser Pro’s fiber-seeded system is approximately 8,000 times narrower in linewidth than that benchmark. That difference in spectral purity is what makes this product usable for high-resolution spectroscopy and precision interferometry at 193 nm, applications that a 640 MHz source cannot serve. 

Output and Operating Parameters

Free-space optical output with 1.0 mm typical beam diameter at the output port and M² below 1.4. Beam waist position within 1 m of the output port. Side-mode suppression ratio of 20 to 24 dB confirms clean single-mode operation throughout the operating range. Output power is adjustable from 50 to 100% of the set level. Power stability holds at below 1% RMS over two hours of continuous operation. Operating temperature range is tightly specified at 20 to 30°C. DUV nonlinear conversion efficiency is sensitive to crystal temperature. Maintaining the operating temperature within this range ensures conversion efficiency and output power remain stable. The compact 330 × 600 × 130 mm footprint fits standard optical tables. For system integration, OEM configurations and custom central wavelengths within the DUV range are available on request. For the wavelength converted fiber laser range covering other UV and visible wavelengths, see Seed Laser Pro’s full converted laser portfolio from 193 nm to 795 nm.

FAQ SECTION

What is a 193 nm single-frequency laser and how is it different from an ArF excimer?

A 193 nm single-frequency laser produces continuous-wave coherent output at 193 nm with narrow linewidth and stable power from a solid-state architecture. An ArF excimer laser generates 193 nm through electrical discharge in a gas mixture of argon and fluorine. Excimer output is pulsed, incoherent, and has a broad linewidth measured in GHz. This solid-state CW source produces sub-80 kHz linewidth continuous output in a sealed system with no gas handling, no high-voltage discharge, and no fluorine gas replacement. The two products serve different application requirements within the 193 nm wavelength space.

What does deep UV mean and why does 193 nm require special handling?

Deep ultraviolet refers to wavelengths below approximately 300 nm. At 193 nm, photon energy is 6.4 eV. Standard optical glass absorbs at this wavelength. Most nonlinear crystals used at longer wavelengths are unsuitable. Oxygen in air absorbs 193 nm radiation. Operating a 193 nm laser system in air requires either purging the beam path with nitrogen or operating in a partial vacuum to avoid absorption losses. The tight operating temperature requirement of 20 to 30°C reflects the sensitivity of the nonlinear conversion stages to thermal variation.

What applications specifically require coherent CW output at 193 nm rather than a pulsed excimer?

Interferometric wavefront metrology of lithography optics, high-resolution absorption spectroscopy of UV-active molecular species, precision material ablation requiring controlled energy delivery rather than high-peak-power pulses, and refractive surgery research requiring stable continuous output. In all of these, the long coherence length and stable power of a CW single-frequency source provide advantages over pulsed incoherent excimer output.

Is the central wavelength customizable?

Yes. The central wavelength is listed as customizable in the specification. Contact Seed Laser Pro’s engineering team with your target wavelength within the DUV range to discuss feasibility and lead time.

What is the operating temperature requirement and why is it narrow?

Operating temperature is specified at 20 to 30°C, narrower than most laser products. Nonlinear frequency conversion efficiency in DUV crystal stages is sensitive to temperature. If the crystal temperature moves outside the phase-matching range, conversion efficiency drops and output power falls. Maintaining the operating environment within the specified 10°C window ensures the conversion stages remain at their design operating point throughout continuous use.

Related products

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    780 nm Frequency-Converted Laser for Rubidium Cooling

    780.24 nm is the rubidium D2 line. Every laser cooling experiment, magneto-optical trap, atom interferometer, and rubidium atomic clock built around rubidium atoms needs a laser locked to this transition. Seed Laser Pro’s 780 nm frequency-converted laser is purpose-built for that requirement.

    The output is generated through second harmonic generation from a 1560 nm single-frequency fiber seed laser. The 780 nm output inherits the narrow linewidth, single longitudinal mode operation, and low phase noise of the fiber seed directly. High-efficiency nonlinear frequency conversion technology and power stabilization produce stable, low-noise output at 780 nm in a compact module format ready for integration into cold atom physics platforms and quantum sensing instruments.

    PRODUCT FEATURES

    • High-Efficiency SHG Frequency Conversion: Second harmonic generation from a 1560 nm single-frequency fiber seed produces 780 nm output with conversion efficiency optimized through nonlinear crystal design and optical path optimization. The 780 nm output carries the spectral purity of the fiber seed.
    • Excellent Beam Quality: Near-diffraction-limited beam quality from the fiber-based source, optimized through beam quality correction in the output stage. Suitable for direct free-space coupling into vacuum chambers and optical setups without additional spatial filtering.
    • Power Stabilization: Active power stabilization keeps output power consistent across operating conditions. Stable output power is a direct requirement for controlled optical pumping efficiency in rubidium cooling and trapping experiments.

    TYPICAL APPLICATIONS

    • Rubidium Laser Cooling and Magneto-Optical Trapping: The 780 nm D2 transition of rubidium-85 and rubidium-87 is the standard wavelength for laser cooling, magneto-optical trapping, and Bose-Einstein condensate experiments. This laser provides the frequency-stable, narrow-linewidth output required to maintain resonance with the D2 line throughout the cooling and trapping sequence.
    • Atom Interferometry and Quantum Sensing: Rubidium atom interferometers used in gravimetry, inertial navigation, and fundamental physics require a 780 nm source with tight frequency control and stable output. This frequency-converted laser provides the spectral characteristics atom interferometric systems demand.
    • Scientific Instruments and Atomic Physics Research: Rubidium atomic clocks, Rydberg atom experiments, quantum computing platforms using rubidium qubits, and precision spectroscopy all operate at or near the 780 nm D2 line. This laser serves as the primary light source for any rubidium-based experiment requiring single-frequency, stable 780 nm illumination.
  • Seed Laser Pro single-frequency fiber laser module (illustrative image)

    532nm Low Noise Single-Frequency Laser

    Green lasers are common. A 532nm low noise laser with single longitudinal mode operation, sub-10 kHz linewidth, and M² below 1.1 is not.

    Seed Laser Pro’s 532 nm frequency-converted laser produces 0.05 to 4 W of continuous-wave green output through second harmonic generation from a single-frequency fiber seed. Linewidth sits between 2 and 10 kHz. Output power stability holds at 0.3% RMS over six hours. Wavelength tuning range reaches 200 pm typically. Both free-space and fiber output options are available. This is a precision green laser source built for applications where intensity noise, beam quality, and spectral purity determine the quality of the result.

    PRODUCT FEATURES

    • High-Efficiency Nonlinear Frequency Conversion:  Second harmonic generation from a single-frequency fiber seed produces 532 nm output with high conversion efficiency. The green output inherits the single longitudinal mode operation and low phase noise of the fiber seed, giving this laser its low noise character at 532 nm.
    • M² Below 1.1 Beam Quality:  Near-perfect Gaussian beam profile with output beam diameter of 0.7 to 1.2 mm and beam waist position within 1 m of the output port. Directly usable in tight-focus applications without additional spatial filtering.
    • Intelligent Power Stabilization: Active output power stabilization holds RMS power stability at 0.3% over six hours of continuous operation. Power adjustable from 10 to 100% of the set output level.

    TYPICAL APPLICATIONS

    • Precision Processing:  Low noise, stable output power, and near-diffraction-limited beam quality make this laser suitable for precision microfabrication, laser scribing, and material processing applications where beam quality and power consistency directly affect process quality.
    • Biomedical Applications:  532 nm green light is strongly absorbed by oxyhemoglobin and melanin, making it the standard wavelength for retinal photocoagulation, dermatological treatments, and fluorescence excitation in biological imaging. The low noise and stable output of this system minimize unwanted tissue effects from power fluctuations.
    • Scientific Instruments and Quantum Optics:  Single-frequency, narrow-linewidth 532 nm output is used in holography, interferometry, Raman spectroscopy, optical tweezers, and as a pump source for optical parametric oscillators targeting visible and near-infrared wavelengths. Low intensity noise is the primary requirement across all of these.
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    795 nm Single-Frequency-Converted Laser

    Seed Laser Pro’s 795 nm single-frequency laser is built around the rubidium D1 transition. It delivers 0.05 to 4 W of CW output at 795 nm with 2 to 5 kHz linewidth and power stability below 0.8% RMS. Designed for SERF magnetometers, rubidium atomic physics, and precision measurement systems. Free-space and fiber output available. Custom wavelength on request.

    Product Features

    • Sub-5 kHz linewidth, single longitudinal mode CW output at 795 nm
    • Output power 0.05 to 4 W, adjustable 10 to 100%, RMS stability below 0.8%
    • Wavelength tuning range 100 to 300 pm, polarization extinction ratio 20 to 26 dB
    • Free-space or fiber output, M² below 1.1, 0.7 to 1.1 mm beam diameter

    Typical Applications

    • SERF magnetometers requiring frequency-stable optical pumping at the rubidium D1 line
    • Rubidium atomic physics, optical pumping, and spin-exchange relaxation-free experiments
    • Precision magnetic field measurement for medical imaging, navigation, and geophysics
    • Quantum optics, polarization squeezing, and rubidium D1 spectroscopy research
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    266 nm Single-Frequency Frequency-Converted Laser

    266 nm sits in the UV-C band, four times the wavelength of the 1064 nm fundamental. Reaching it requires fourth-harmonic generation from a near-infrared fiber seed. Doing it with narrow linewidth requires that every conversion stage preserves the spectral quality of the starting source.

    Seed Laser Pro’s 266 nm Single-Frequency Laser delivers 5 to 15 mW of CW output at 266 nm. Linewidth is 5 to 25 kHz. Power stability holds at 1% RMS over three hours. Wavelength tuning range covers 50 to 150 pm. Free-space output with M² below 1.3 and 1.0 mm typical beam diameter.

    Built for semiconductor material processing, UV fluorescence analysis, photochemistry, and precision UV spectroscopy. Custom wavelength configurations are available.

    PRODUCT FEATURES

    • Fourth-Harmonic Generation at 266 nm : CW output at 266 nm produced through two sequential second-harmonic generation steps from a 1064 nm single-frequency fiber seed. The conversion chain is designed to preserve narrow linewidth at each stage. The 266 nm output inherits the spectral purity of the fiber source.
    • Sub-25 kHz Linewidth : Linewidth between 5 and 25 kHz at 266 nm. Coherence length at this linewidth exceeds several kilometers. Sufficient for high-resolution UV spectroscopy, interferometric measurements, and precision material processing where coherence quality affects the result.
    • Active Power Stabilization : Output power stable at 1% RMS over three hours of continuous operation. Adjustable from 10 to 100% of the set output level throughout operation.
    • Clean Free-Space Output : M² below 1.3, 0.8 to 1.2 mm beam diameter, beam waist within 1 m of the output port. Fits standard optical tables at 290 × 500 × 130 mm.

    TYPICAL APPLICATIONS 

    • Semiconductor Processing and Inspection : 266 nm photons carry 4.66 eV per photon. That energy level exceeds the bandgap of many semiconductor and dielectric materials, enabling direct photochemical processing without the thermal damage that longer UV wavelengths cause. Narrow linewidth CW output supports both direct processing and interferometric inspection of processed surfaces.
    • Material Analysis and UV Fluorescence : Many organic molecules, aromatic compounds, and biological markers have absorption and fluorescence excitation bands in the 260 to 270 nm range. A single-frequency, narrow-linewidth 266 nm source provides selective excitation of specific spectral features that broadband UV lamps cannot resolve.
    • Photochemistry Research : Photochemical reactions initiated at 266 nm are used in polymer synthesis, photocatalysis, and photodegradation studies. Narrow linewidth allows wavelength-selective excitation of specific reactant absorption bands for controlled reaction chemistry.
    • UV Spectroscopy and Metrology : Sub-25 kHz linewidth at 266 nm supports high-resolution absorption spectroscopy of UV-active species and interferometric metrology of UV optical components. Both applications require coherence far beyond what pulsed or broadband UV sources provide.

    Need a custom configuration? Central wavelength is customizable. OEM integration, custom power levels, and engineering support available at the design stage.

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